Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices
نویسندگان
چکیده
منابع مشابه
Suppression of Stiction in MEMS
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS. Stiction failures require first a collapse force that brings the elastic member contact with the substrate followed by an i...
متن کاملFailure modes for stiction in surface-micromachined MEMS
Wafer-level testing of surface-micromachined sensors provides ncw challenges to the test community. Currently, there is no method available for performing direct measurements to assess faulty micromechanical structures. Most commercial methods use electrical measurements to deduce the physical source of failures in the micromechanical structure. As a result, the process of identifyang various f...
متن کاملLow Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF meas...
متن کاملSelf-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...
متن کاملModelling Valve Stiction 1
The presence of nonlinearities, e.g., stiction, and deadband in a control valve limits the control loop performance. Stiction is the most commonly found valve problem in the process industry. In spite of many attempts to understand and model the stiction phenomena, there is a lack of a proper model, which can be understood and related directly to the practical situation as observed in real valv...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2016
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2016.2525008